Nikon Metrology HN-6060 Non-contact multi-sensor 3D metrology system (obsolete)

• Ryf AG

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Nikon 3D metrology system — from critical dimension measurement to highprecision, non-contact shape inspection

The HN-6060 — Nikon’s next-generation, non-contact, 3D metrology system is equipped with the latest multisensing metrology technologies, including a newly developed high-precision laser scanner that combines optical and image processing technologies. As a new generation metrology system, the HN-6060 assists the manufacturing process and assures product quality.

The HN-6060 non-contact, multi-sensor, 3D metrology system makes automatic shape measurement of complex components a reality. With a two-axis rotary table and a three-axis high-rigidity air bearing construction CMM, incorporating five-axis synchronous linear motor drive and control mechanism, the hardware has been optimized for stability. Additionally, with the adoption of Nikon’s proprietary low thermal expansion encoder scales and a design optimized for minimizing Abbé errors, the accuracy of the this high-precision 3D measurement instrument is 1.5+4L/1000 μm.

The HN-6060 is equipped with newly developed high-speed and highprecision laser scanner and SFF (shape from focus) sensor, which uses active texture projection to perform high-precision measurement of shapes even with glossy surfaces or with no surface texture. Touch probes and optical heads with built-in TTL laser AF (with proven performance in Nikon’s NEXIV VMR series CNC Video Measuring System) complete the multi-sensor system. The system’s use of multi-sensors allows it to perform diverse shape measurements of parts such as complex automotive and machined components, molded parts, medical devices etc.